EV Group (EVG)

EV Group (EVG) targets the global semiconductor, MEMS and nanotechnology markets with its industry-leading wafer-bonding, lithography/nanoimprint lithography (NIL), metrology, photoresist coating, cleaning and inspection equipment.

EV Group (EVG) is a leading supplier of high-volume production equipment and process solutions for the manufacture of semiconductors, MEMS, compound semiconductors, power devices and nanotechnology devices.

A recognized market and technology leader in wafer-level bonding and lithography for advanced packaging and nanotechnology, EVG’s key products include wafer bonding, thin-wafer processing and lithography/nanoimprint lithography (NIL) equipment, photoresist coaters, as well as cleaning and inspection/metrology systems.

With state-of-the-art application labs and cleanrooms at its headquarters in Austria, as well as in the U.S. and Japan, EVG is focused on delivering superior process expertise to its global R&D and production customer and partner base – from the initial development through to the final integration at the customer’s site.

Founded in 1980, EVG services and supports an elaborate network of global customers and partners all over the world, with more than 1000 employees worldwide and fully-owned subsidiaries in the U.S., Japan, South Korea, China and Taiwan.

©EV Group (EVG)
©EV Group (EVG)


Wafer bonding process expertise and equipment provider

Key contribution

Development of a wafer bonding process for MEMS capping and industrial implementation in EVG commercial bonding equipment

EV Group (EVG)  

DI Erich Thallner Str. 1, 4782 St. Florian / Inn, Austria
Phone: +43 7712 53110
E-mail: info@evgroup.com
Web: www.evgroup.com